Wafer Loader mWL 150 / 200t

The Wafer Loader mWL 150 / 200t is designed for fully automated loading and unloading of 150 / 200mm（6" / 8"）thin - wafers from cassettes onto an external chuck for visual inspection. 

The mWL 150 / 200t comes with a dual - arm - robot（with flip box optional），a combination of Bernoulli vacuum - and top grip end - effectors，two cassette stations with scanners，a pre - aligner，an end - effector change station，a transfer station（for storing a wafer while taking a different end - effector for further process）incl.an end - effector cleaner，as well as a touch screen.Optionally it can individually be equipped with a wafer flipping function and a customized external chuck.

The adaptation to OEM tools according to customer requirements is possible.